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Chapter 06 — Wastes from inorganic chemical processes Non-Hazardous

EWC Code

06 08

Wastes from manufacture, formulation, supply and use of silicon and silicon compounds

EUR-Lex Commission Decision 2000/532/EC — Official Journal L 226, 06/09/2000

Annual Volume

~50–200 kt/year silicon process waste across EU

Valorisation Range

Silicon kerf slurry €20–80/t recovered; silane off-gas destruction cost €100–300/t

Primary Route

Silicon kerf recovery

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Waste Classification

EWC 06 08 covers wastes from the manufacture and processing of silicon and silicone-based compounds, including silicon kerf slurry from wafer sawing, trichlorosilane (TCS) off-gases and residues from polysilicon production (Siemens process), and silica gel wastes. Sub-code 06 08 02* (chlorosilane-containing wastes) is hazardous due to reactivity with water and hydrogen chloride generation.

Polysilicon production (for solar PV and electronics) generates significant chlorosilane waste streams — SiCl₄ (silicon tetrachloride), SiHCl₃ (TCS) and SiH₂Cl₂ byproducts. Large-scale facilities typically hydrogenate SiCl₄ back to TCS for recycling. Silicon kerf slurry from multi-wire wafer sawing contains fine silicon powder, polyethylene glycol coolant and silicon carbide abrasive — a valuable silicon recovery feedstock.

EU silicon manufacturing is expanding with solar PV growth (REPowerEU solar strategy). Silicon kerf recovery by acid leaching, flotation or spray drying is established — recovered silicon powder reused in metallurgical or anode applications. Closed-loop chlorosilane circuits at polysilicon plants are BAT, minimising 06 08 02* waste arisings. Amorphous silica by-product from ethylene and propylene production via silica-alumina catalysis generates large volumes of spent silica.

Typical Generators

Polysilicon manufacturers
Silicon wafer slicing operations
Silicone polymer producers

Disposal & Valorisation Routes

Established valorisation pathways for EWC 06 08, ranked by economic value and market depth. Silicon kerf recovery is the primary route.

Silicon kerf recovery

Primary

Kerf slurry processed by acid leaching to remove iron and other metals, flotation to separate SiC from Si, and spray drying. Recovered Si powder sold to metallurgical silicon consumers or lithium-ion battery anode manufacturers (silicon-graphite composites). PEG coolant recovered and recycled.

Chlorosilane hydrolysis and SiO₂ recovery

Secondary

Chlorosilane waste (06 08 02*) hydrolysed with controlled water addition in scrubbing system to produce HCl (recovered) and amorphous silica (SiO₂). SiO₂ sold to refractory, rubber or silicone sealant manufacturers. HCl neutralised or recycled to TCS production.

Hazardous waste incineration / specialist disposal

Backstop

Off-specification chlorosilane and silicon-organic mixtures (06 08 02*) incinerated at permitted high-temperature facilities with HCl scrubbing. Inert silica residues from scrubbing disposed at inert landfill.

These are the established routes for EWC 06 08. Which one your stream qualifies for depends on its composition, volume and region.

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NACE Receiving Industries

Primary & secondary off-takers

01
Manufacture of electronic components

Wafer manufacturers generate kerf slurry; some recover silicon in-house or via contracted recyclers

02
Manufacture of other chemical products

Silicone producers accept amorphous SiO₂ from chlorosilane hydrolysis as silicone formulation feedstock

03
Processing of nuclear fuel

Polysilicon producers (some collocated with nuclear fuel enrichment sites) manage TCS/SiCl₄ circuits

04
Treatment and disposal of hazardous waste

Specialist firms handle reactive chlorosilane waste requiring controlled hydrolysis

Source: NACE Rev.2 — Eurostat, 2008

Regulatory Context

Key legislative frameworks governing EWC 06 08 classification, transport, and treatment.

IED 2010/75/EU — Silicon and silicone BREF

Polysilicon production by Siemens process covered under IED chemical sector. Closed-loop TCS/SiCl₄ hydrogenation is BAT. HCl emissions from chlorosilane hydrolysis subject to ELV of ≤10 mg/Nm³.

ADR — Transport of chlorosilanes

Chlorosilane waste classified ADR Class 8 (corrosive) and/or Class 4.3 (reacts dangerously with water, producing flammable gas). UN numbers: UN 1818 (SiCl₄), UN 1295 (SiHCl₃). Packaging Group I. Specialist tanker or IBC transport required.

REACH — Crystalline silica worker exposure

Silicon kerf slurry contains crystalline silica (SiC abrasive and potential quartz contamination). Workers handling dry kerf waste exposed to respirable crystalline silica (RCS) — REACH SVHC consultation and occupational exposure limit (OEL) of 0.1 mg/m³ apply.

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Industries That Use This Waste

Sectors that valorise EWC 06 08 as an input material or secondary raw material.

Explore EU waste flows — Waste Atlas

Visualise 17 years of E-PRTR industrial facility data. See how EWC 06 08 and related waste streams flow across European industries and sectors.

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Source: EUR-Lex Commission Decision 2000/532/EC · NACE Rev.2 — Eurostat 2008

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